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RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD

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Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers
  • Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers
  • Buy cheap RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System from wholesalers

RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

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Brand Name:ROYAL
Model Number:RTSP1200
Certification:TUV CE
Price:negotiable
Payment Terms:L/C, D/A, D/P, T/T
Supply Ability:6 sets per month
Delivery Time:16 weeks
Company Data
Verified Supplier
Contact Person ZHOU XIN
Business Type: Manufacturer
Officials: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613
Quality: Quality Certifitation Available
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Product Details Company Profile
Product Details

PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System​


Why us?

  1. Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.

  2. Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.

  3. Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.


The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

It is 100% envrionmetally friendly technology and vechiles.


Our machine RTSP1200 model is exclusively designed and developed for this appliation. We cooperated with Shanghai Jiaotong Unversity and SAIC Motor Corporation Limited Company.


Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.


The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.


Hydrogen Fuel Cell Power Module Sputtering System Specifications


MODELRTSP1200
MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1200*1300mm (H)
CHAMBER TYPEFront and back 2-doors structure, Vertical
SINGLE PUMP PACKAGERotary Piston Vacuum Pump
Roots Vacuum Pump
Magnetic Suspension Molecular Pump
Rotary Vane Pump (Holding Pump)
TECHNOLOGYMagnetron Sputtering, Ion Source PECVD
POWER SUPPLYSputtering power supply + Bias Power supply + Ion Source
DEPOSITION SOURCE2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
CONTROLPLC+Touch Screen
GASGas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
COOLINGCooling Water
CLEANINGGlow Discharge/Ion Source
POWER MAX.150KW
AVERAGE POWER CONSUMPTION75KW

RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System


The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.


Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Company Profile

SHANGHAI ROYAL TECHNOLOGY INC.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.


ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.

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